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Patents

Current position: Home  >  Scientific Research  >  Patents

MEMS微器件的表面改性处理方法及装置

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Type of Patent:发明

State of Patent:已授权

Authorization number:200910232279.5

Service Invention or Not:no

Application Date:2009-12-10

Authorization Date:2013-06-12

Application Date:2009-12-10

Authorization Date:2013-06-12