Affiliation of Participant(s):4a4321c94a2af4ad014a2af5f5e60096
Leading Scientist:张朝阳
Nature of Project:光电复合对绝缘硬脆材料的交互协同作用及微刻蚀研究
Project level:3
Date of Project Approval:2016-09-01
Scheduled completion time:2019-08-31
Pre One:激光背向隐聚焦与电化学放电的多效应协同机理及微裂蚀研究
Next One:应用于PLC晶圆激光切割装置及带有该装置的皮秒激光器
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