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MOCVD外延生长的反应动力学-流体力学耦合研究
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Note:装备预研基金项目-重点实验室基金
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枝晶诱导生长大晶粒铸造多晶硅的传热传质研究
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一种多晶硅铸锭炉氩气导流系统及其导流方法