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HVPE工艺氮化镓炉体三维数值设计与优化

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Affiliation of Participant(s):40300

Leading Scientist:苏文佳

Nature of Project:HVPE工艺氮化镓炉体三维数值设计与优化

Date of Project Approval:2026-02-06

Date of Project Initiation:2026-02-06

Scheduled completion time:2029-12-31