Gender:Male
Alma Mater:浙江大学
Education Level:With Certificate of Graduation for Doctorate Study
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Affiliation of Participant(s):500190
Leading Scientist:钱鹏飞
Nature of Project:面向半导体晶圆双面超精密研抛的无摩涡阻气动系统及其高精度控制策略研究
Project level:1
Date of Project Approval:2025-09-15
Date of Project Initiation:2026-01-01
Scheduled completion time:2029-12-01
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