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Influence of Al/Cu thickness ratio and deposition sequence on photoelectric property of ZnO/Al/Cu/ZnO multilayer film on PET substrate prepared by RF magnetron sputtering

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  • Journal:Materials Science in Semiconductor Processing

  • Indexed by:SCI

  • Document Type:J

  • Volume:91

  • Page Number:73~80

  • Translation or Not:no

  • Date of Publication:2019-03-01

  • Included Journals:SCI、EI
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