Synchronized Oscillation in Micro-Mechanically Coupled Oscillator System—Part III: Optimization of Polymer-Based Structures Applicable to Gas Molecule Sensing
发布时间:2026-10-12 点击次数:
发表刊物:In 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
是否译文:否
